| 品牌:MKS | | 型号:390610-2-YG-T | | 加工定制:否 | |
| 测量范围:1.0 x 10-9 to 760 Torr | | 测量精度:15%读值 | | 重复性:±5% of Reading | |
| 尺寸:55*98 mm | | 电源:24 VDC (11 - 26.4 VDC) at 0.2A | | 用途:真空测量 | |
390微离子®模块结合了经过验证的微离子电离计技术、微型热损失传感器和两个压阻式传感器,提供从高真空到大气压的精确连续压力测量。
The Micro-Ion® ATM module combines proven Micro-Ionionization gauge technology with a miniature Conductronheat loss sensor and two Piezo resistive sensors to provideaccurate, continuous pressure measurement from highvacuum to atmosphere
This small module combines all foursensors and control electronics in a compact modulardesign, reducing the number of gauges required on achamber and minimizing the required space.全范围压力测量结果作为单个模拟信号输出,或者通过可选的 EtherCAT®、RS-485 或 DeviceNet™ 接口提供。